SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.
| Pumping Speed | 4200 m³/h |
| Bearing Design | Dual-End Bearing Support |
| Cooling Water Temperature | 5-25 °C |
| Noise Level | ≤75 dB(A) |
| Control Interface | I/O and RS485 (Modbus Protocol) |
| Voltage | 380V Three-Phase |
| Weight | 269 kg |
| Cooling Water Flow | 8-10 L/min |
| Outlet Connection | KF50 |
| Dimensions (L×W×H) | 1695×600×1450 mm |
| Supply Ability | 100 Sets per Month |
| Delivery Time | 25-40 working days |
| Rated Power | 13+10 kW |
| N2 Purge Flow | 0-120 L/min |
| Sealing System | Lip Seal + Labyrinth Seal with N2 Purge |
| Inlet Connection | ISO160 |
| Packaging Details | Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert |
| Motor Type | Permanent Magnet Synchronous Motor (PMSM) |
| Ultimate Pressure | ≤0.5 Pa |
| Pump Type | Dry Vacuum Pump |
| Control Mode | Smart PLC with One-Button Start/Stop |
| Payment Terms | T/T, L/C, Western Union |
| Place of Origin | China |
| Model Number | GRM4201 |
| Brand Name | GRM |
| Certification | ISO 9001:2015, ISO 14001:2015, ISO 45001:2018, CE, ETL |
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Product Specification
| Pumping Speed | 4200 m³/h | Bearing Design | Dual-End Bearing Support |
| Cooling Water Temperature | 5-25 °C | Noise Level | ≤75 dB(A) |
| Control Interface | I/O and RS485 (Modbus Protocol) | Voltage | 380V Three-Phase |
| Weight | 269 kg | Cooling Water Flow | 8-10 L/min |
| Outlet Connection | KF50 | Dimensions (L×W×H) | 1695×600×1450 mm |
| Supply Ability | 100 Sets per Month | Delivery Time | 25-40 working days |
| Rated Power | 13+10 kW | N2 Purge Flow | 0-120 L/min |
| Sealing System | Lip Seal + Labyrinth Seal with N2 Purge | Inlet Connection | ISO160 |
| Packaging Details | Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert | Motor Type | Permanent Magnet Synchronous Motor (PMSM) |
| Ultimate Pressure | ≤0.5 Pa | Pump Type | Dry Vacuum Pump |
| Control Mode | Smart PLC with One-Button Start/Stop | Payment Terms | T/T, L/C, Western Union |
| Place of Origin | China | Model Number | GRM4201 |
| Brand Name | GRM | Certification | ISO 9001:2015, ISO 14001:2015, ISO 45001:2018, CE, ETL |
| High Light | Oil Free dry vacuum pump ，4200 m³/h dry vacuum pump ，HJT Lithium Battery dry vacuum pump | ||
The GRM4201 is a high-capacity 4200 m³/h dry vacuum pump achieving exceptional vacuum levels with wide working pressure range and superior dust handling. With dual-end bearing support, water-cooled fully sealed motor, and smart PLC one-button control, it is ideal for HJT cell manufacturing, lithium battery production, and semiconductor Load-Lock rapid evacuation.
| Parameter | Specification |
|---|---|
| Pumping Speed | 4200 m³/h |
| Ultimate Pressure | ≤0.5 Pa |
| Rated Power | 13+10 kW |
| Voltage | 380V Three-Phase |
| Cooling Water Pressure | 0.2-0.5 MPa |
| Cooling Water Flow | 8-10 L/min |
| Cooling Water Temperature | 5-25 °C |
| Cooling Water Connection | G3/8 |
| N2 Purge Pressure | 0.1-0.7 MPa |
| N2 Purge Flow | 0-120 L/min |
| N2 Purge Connection | G1/4 |
| Inlet Connection | ISO160 |
| Outlet Connection | KF50 |
| Noise Level | ≤75 dB(A) |
| Operating Environment | 5~40°C; ≤80% RH |
| Weight | 269 kg |
| Dimensions (L*W*H) | 1695*600*1450 mm |
Load-Lock, Transfer, Metrology, Lithography
PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch
HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD
Company Details
Business Type:
Manufacturer,Distributor/Wholesaler,Agent,Exporter,Trading Company,Seller
Ecer Certification：
Verified Supplier
Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c... Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c...
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