GRH3001 3000 M³/H dry type vacuum pump with Permanent Magnet Synchronous Motor

MOQ： 1 Set
Price： USD 18,000-25,000 / Set
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Pumping Speed	3000 m³/h
Delivery Time	15-30 working days
Cooling Water Temperature	5-30 °C
Noise Level	≤70 dB(A)
Control Interface	I/O and RS485 (Modbus Protocol)
Voltage	380V Three-Phase
Weight	770 kg
Cooling Water Flow	≥11 L/min
Outlet Connection	KF40
Supply Ability	500 Sets per Month
Dimensions (L×W×H)	922×516×988 mm
Rated Power	11+7.5 kW
N2 Purge Flow	43-123 L/min
Sealing System	Lip Seal + Labyrinth Seal with N2 Purge
Motor Type	Permanent Magnet Synchronous Motor (PMSM)
Payment Terms	T/T, L/C, Western Union
Inlet Connection	ISO160
Packaging Details	Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert
Pump Type	Dry Vacuum Pump
Ultimate Pressure	≤0.5 Pa
Certification	ISO 9001:2015, ISO 14001:2015, ISO 45001:2018
Brand Name	GRH
Model Number	GRH3001
Place of Origin	China

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Product Details
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Product Specification


Pumping Speed	3000 m³/h	Delivery Time	15-30 working days
Cooling Water Temperature	5-30 °C	Noise Level	≤70 dB(A)
Control Interface	I/O and RS485 (Modbus Protocol)	Voltage	380V Three-Phase
Weight	770 kg	Cooling Water Flow	≥11 L/min
Outlet Connection	KF40	Supply Ability	500 Sets per Month
Dimensions (L×W×H)	922×516×988 mm	Rated Power	11+7.5 kW
N2 Purge Flow	43-123 L/min	Sealing System	Lip Seal + Labyrinth Seal with N2 Purge
Motor Type	Permanent Magnet Synchronous Motor (PMSM)	Payment Terms	T/T, L/C, Western Union
Inlet Connection	ISO160	Packaging Details	Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert
Pump Type	Dry Vacuum Pump	Ultimate Pressure	≤0.5 Pa
Certification	ISO 9001:2015, ISO 14001:2015, ISO 45001:2018	Brand Name	GRH
Model Number	GRH3001	Place of Origin	China
High Light	Permanent Magnet Motor dry vacuum pump ，3000 m³/h dry vacuum pump ，Semiconductor PV dry vacuum pump

GRH3001 Dry Vacuum Pump

The GRH3001 is a 3000 m³/h dry vacuum pump built for medium-to-large scale semiconductor and photovoltaic manufacturing. It combines an oil-free pump chamber, compact design, and low energy consumption for reliable high-volume performance.

Key Features

Permanent Magnet Synchronous Motor — Delivers superior energy efficiency and lower power consumption compared to conventional induction motors.
Advanced Rotor Structure — Enhanced dust extraction capability, making the pump highly tolerant to particulate-laden process gases.
Dust and Water Vapor Tolerant — Insensitive to dust and water vapor entrained in the pumped gas stream.
Compact and Integrated Design — Small footprint with high system integration for easy installation in crowded fab environments.
Comprehensive Protection — Built-in protection functions with strong adaptive capability for varying process conditions.
Low Vibration and Noise — Operates at ≤70 dB(A) at ultimate pressure for a quieter workplace.
Advanced Sealing System — Lip seal and labyrinth seal combined with nitrogen purge effectively prevents oil back-streaming, ensuring high vacuum cleanliness in the process chamber.
Remote Control and Monitoring — Supports I/O interface and RS485 communication (Modbus protocol) for seamless integration into factory automation systems.

Technical Specifications

Parameter	Specification
Pumping Speed	3000 m³/h
Ultimate Pressure	≤0.5 Pa
Rated Power	11+7.5 kW
Voltage	380V Three-Phase
Cooling Water Pressure	0.2-0.6 MPa
Cooling Water Flow	≥11 L/min
Cooling Water Temperature	5-30 °C
Cooling Water Connection	G3/8
N2 Purge Pressure	0.2-0.6 MPa
N2 Purge Flow	43-123 L/min
N2 Purge Connection	G1/4
Inlet Connection	ISO160
Outlet Connection	KF40
Noise Level	≤70 dB(A)
Operating Environment	5~40°C; ≤80% RH
Weight	770 kg
Dimensions (LWH)	922516988 mm

Application Processes

Clean Processes

Load-Lock, Transfer, Metrology, Lithography

Medium Processes

PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch

Harsh Processes

HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD

Target Industries

Semiconductor: Etching, ion implantation, CVD, and other clean, medium, and harsh process applications.
Photovoltaic: Crystal growth furnaces, cell manufacturing processes.
Lithium Battery: Cell vacuum drying, electrolyte filling, and degassing processes.
Flat Panel Display & LED: Manufacturing processes requiring high-cleanliness vacuum environments.

Company Details

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Business Type:

Manufacturer,Distributor/Wholesaler,Agent,Exporter,Trading Company,Seller 
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Ecer Certification：

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Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c... Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c...

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SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.
#3,No.152 Kangzhuang Rd,Zhoushi Town,Kunshan city,Suzhou,PRC.
https://www.industrial-vacuumpump.com/

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