SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.
| Pumping Speed | 600 m³/h |
| Gas Compatibility | Flammable, explosive, and condensable process gases |
| Delivery Time | 15-30 working days |
| Dimensions (L×W×H) | 865×344×751 mm |
| Cooling Water Temperature | 5-30 °C |
| Noise Level | ≤63 dB(A) |
| Control Interface | I/O and RS485 (Modbus Protocol) |
| Payment Terms | T/T, L/C, Western Union |
| Voltage | 380V Three-Phase |
| Weight | 260 kg |
| Cooling Water Flow | ≥4 L/min |
| Outlet Connection | KF25 |
| Rated Power | 1.9+1.9 kW |
| N2 Purge Flow | 12-50 L/min |
| Sealing System | Lip Seal + Labyrinth Seal with N2 Purge |
| Packaging Details | Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert |
| Inlet Connection | ISO100 |
| Supply Ability | 300 Sets per Month |
| Motor Type | Permanent Magnet Synchronous Motor (PMSM) |
| Ultimate Pressure | ≤0.15 Pa |
| Pump Type | Dry Vacuum Pump |
| Place of Origin | China |
| Certification | ISO 9001:2015, ISO 14001:2015, ISO 45001:2018 |
| Brand Name | GRM |
| Model Number | GRM601 |
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Product Specification
| Pumping Speed | 600 m³/h | Gas Compatibility | Flammable, explosive, and condensable process gases |
| Delivery Time | 15-30 working days | Dimensions (L×W×H) | 865×344×751 mm |
| Cooling Water Temperature | 5-30 °C | Noise Level | ≤63 dB(A) |
| Control Interface | I/O and RS485 (Modbus Protocol) | Payment Terms | T/T, L/C, Western Union |
| Voltage | 380V Three-Phase | Weight | 260 kg |
| Cooling Water Flow | ≥4 L/min | Outlet Connection | KF25 |
| Rated Power | 1.9+1.9 kW | N2 Purge Flow | 12-50 L/min |
| Sealing System | Lip Seal + Labyrinth Seal with N2 Purge | Packaging Details | Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert |
| Inlet Connection | ISO100 | Supply Ability | 300 Sets per Month |
| Motor Type | Permanent Magnet Synchronous Motor (PMSM) | Ultimate Pressure | ≤0.15 Pa |
| Pump Type | Dry Vacuum Pump | Place of Origin | China |
| Certification | ISO 9001:2015, ISO 14001:2015, ISO 45001:2018 | Brand Name | GRM |
| Model Number | GRM601 | ||
| High Light | ISO100 Inlet dry vacuum pump ，600 m³/h dry vacuum pump ，KF25 Outlet dry vacuum pump | ||
The GRM601 is a 600 m³/h dry vacuum pump offering low power consumption and high pumping speed. It safely handles flammable, explosive, and condensable process gases, engineered for PECVD, MOCVD, and SIC-CVD semiconductor processes.
| Parameter | Specification |
|---|---|
| Pumping Speed | 600 m³/h |
| Ultimate Pressure | ≤0.15 Pa |
| Rated Power | 1.9+1.9 kW |
| Voltage | 380V Three-Phase |
| Cooling Water Pressure | 0.2-0.6 MPa |
| Cooling Water Flow | ≥4 L/min |
| Cooling Water Temperature | 5-30 °C |
| Cooling Water Connection | G3/8 |
| N2 Purge Pressure | 0.2-0.6 MPa |
| N2 Purge Flow | 12-50 L/min |
| N2 Purge Connection | G1/4 |
| Inlet Connection | ISO100 |
| Outlet Connection | KF25 |
| Noise Level | ≤63 dB(A) |
| Operating Environment | 5~40°C; ≤80% RH |
| Weight | 260 kg |
| Dimensions (L*W*H) | 865*344*751 mm |
Load-Lock, Transfer, Metrology, Lithography
PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch
HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD
Company Details
Business Type:
Manufacturer,Distributor/Wholesaler,Agent,Exporter,Trading Company,Seller
Ecer Certification：
Verified Supplier
Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c... Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c...
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