SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.
| Pumping Speed | 1200 m³/h |
| Cooling Water Flow | ≥4.7 L/min |
| Outlet Connection | KF40 |
| Dimensions (L×W×H) | 821×420×791 mm |
| Payment Terms | T/T, L/C, Western Union |
| Cooling Water Temperature | 5-30 °C |
| Noise Level | ≤70 dB(A) |
| Control Interface | I/O and RS485 (Modbus Protocol) |
| Voltage | 380V Three-Phase |
| Weight | 220 kg |
| Rated Power | 7.5+1.9 kW |
| N2 Purge Flow | 4-96 L/min |
| Sealing System | Lip Seal + Labyrinth Seal with N2 Purge |
| Packaging Details | Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert |
| Motor Type | Permanent Magnet Synchronous Motor (PMSM) |
| Inlet Connection | ISO100 |
| Supply Ability | 500 Sets per Month |
| Ultimate Pressure | ≤0.5 Pa |
| Pump Type | Dry Vacuum Pump |
| Delivery Time | 15-30 working days |
| Place of Origin | China |
| Certification | ISO 9001:2015, ISO 14001:2015, ISO 45001:2018 |
| Brand Name | GRH |
| Model Number | GRH1202 |
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Product Specification
| Pumping Speed | 1200 m³/h | Cooling Water Flow | ≥4.7 L/min |
| Outlet Connection | KF40 | Dimensions (L×W×H) | 821×420×791 mm |
| Payment Terms | T/T, L/C, Western Union | Cooling Water Temperature | 5-30 °C |
| Noise Level | ≤70 dB(A) | Control Interface | I/O and RS485 (Modbus Protocol) |
| Voltage | 380V Three-Phase | Weight | 220 kg |
| Rated Power | 7.5+1.9 kW | N2 Purge Flow | 4-96 L/min |
| Sealing System | Lip Seal + Labyrinth Seal with N2 Purge | Packaging Details | Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert |
| Motor Type | Permanent Magnet Synchronous Motor (PMSM) | Inlet Connection | ISO100 |
| Supply Ability | 500 Sets per Month | Ultimate Pressure | ≤0.5 Pa |
| Pump Type | Dry Vacuum Pump | Delivery Time | 15-30 working days |
| Place of Origin | China | Certification | ISO 9001:2015, ISO 14001:2015, ISO 45001:2018 |
| Brand Name | GRH | Model Number | GRH1202 |
| High Light | Semiconductor dry vacuum pump ，1200 m³/h dry vacuum pump ，Photovoltaic dry vacuum pump | ||
The GRH1202 is a 1200 m³/h dry vacuum pump engineered for semiconductor, photovoltaic, and lithium battery manufacturing processes. It features a completely oil-free pump chamber, compact footprint, and low energy consumption, delivering reliable performance with low total cost of ownership.
| Parameter | Specification |
|---|---|
| Pumping Speed | 1200 m³/h |
| Ultimate Pressure | ≤0.5 Pa |
| Rated Power | 7.5+1.9 kW |
| Voltage | 380V Three-Phase |
| Cooling Water Pressure | 0.1-0.6 MPa |
| Cooling Water Flow | ≥4.7 L/min |
| Cooling Water Temperature | 5-30 °C |
| Cooling Water Connection | G3/8 |
| N2 Purge Pressure | 0.2-0.6 MPa |
| N2 Purge Flow | 4-96 L/min |
| N2 Purge Connection | G1/4 |
| Inlet Connection | ISO100 |
| Outlet Connection | KF40 |
| Noise Level | ≤70 dB(A) |
| Operating Environment | 5~40°C; ≤80% RH |
| Weight | 220 kg |
| Dimensions (L*W*H) | 821*420*791 mm |
Load-Lock, Transfer, Metrology, Lithography
PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch
HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD
Company Details
Business Type:
Manufacturer,Distributor/Wholesaler,Agent,Exporter,Trading Company,Seller
Ecer Certification：
Verified Supplier
Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c... Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c...
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