SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.
| Pumping Speed | 1200 m³/h |
| Gas Compatibility | Flammable, explosive, and condensable process gases |
| Cooling Water Flow | ≥4 L/min |
| Outlet Connection | KF25 |
| Dimensions (L×W×H) | 865×344×751 mm |
| Cooling Water Temperature | 5-30 °C |
| Noise Level | ≤63 dB(A) |
| Control Interface | I/O and RS485 (Modbus Protocol) |
| Payment Terms | T/T, L/C, Western Union |
| Voltage | 380V Three-Phase |
| Weight | 260 kg |
| Delivery Time | 15-30 working days |
| Rated Power | 1.9+1.9 kW |
| N2 Purge Flow | 12-50 L/min |
| Sealing System | Lip Seal + Labyrinth Seal with N2 Purge |
| Motor Type | Permanent Magnet Synchronous Motor (PMSM) |
| Supply Ability | 300 Sets per Month |
| Inlet Connection | ISO160 |
| Packaging Details | Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert |
| Ultimate Pressure | ≤0.15 Pa |
| Pump Type | Dry Vacuum Pump |
| Place of Origin | China |
| Certification | ISO 9001:2015, ISO 14001:2015, ISO 45001:2018 |
| Brand Name | GRM |
| Model Number | GRM1201 |
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Product Specification
| Pumping Speed | 1200 m³/h | Gas Compatibility | Flammable, explosive, and condensable process gases |
| Cooling Water Flow | ≥4 L/min | Outlet Connection | KF25 |
| Dimensions (L×W×H) | 865×344×751 mm | Cooling Water Temperature | 5-30 °C |
| Noise Level | ≤63 dB(A) | Control Interface | I/O and RS485 (Modbus Protocol) |
| Payment Terms | T/T, L/C, Western Union | Voltage | 380V Three-Phase |
| Weight | 260 kg | Delivery Time | 15-30 working days |
| Rated Power | 1.9+1.9 kW | N2 Purge Flow | 12-50 L/min |
| Sealing System | Lip Seal + Labyrinth Seal with N2 Purge | Motor Type | Permanent Magnet Synchronous Motor (PMSM) |
| Supply Ability | 300 Sets per Month | Inlet Connection | ISO160 |
| Packaging Details | Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert | Ultimate Pressure | ≤0.15 Pa |
| Pump Type | Dry Vacuum Pump | Place of Origin | China |
| Certification | ISO 9001:2015, ISO 14001:2015, ISO 45001:2018 | Brand Name | GRM |
| Model Number | GRM1201 | ||
| High Light | Semiconductor PV dry vacuum pump ，1200 m³/h dry vacuum pump ，ISO160 KF25 dry vacuum pump | ||
The GRM1201 is a 1200 m³/h dry vacuum pump with low power consumption and high pumping speed for large exhaust volume applications. It handles flammable, explosive, and condensable process gases, designed for demanding PECVD, MOCVD, and SIC-CVD processes.
| Parameter | Specification |
|---|---|
| Pumping Speed | 1200 m³/h |
| Ultimate Pressure | ≤0.15 Pa |
| Rated Power | 1.9+1.9 kW |
| Voltage | 380V Three-Phase |
| Cooling Water Pressure | 0.2-0.6 MPa |
| Cooling Water Flow | ≥4 L/min |
| Cooling Water Temperature | 5-30 °C |
| Cooling Water Connection | G3/8 |
| N2 Purge Pressure | 0.2-0.6 MPa |
| N2 Purge Flow | 12-50 L/min |
| N2 Purge Connection | G1/4 |
| Inlet Connection | ISO160 |
| Outlet Connection | KF25 |
| Noise Level | ≤63 dB(A) |
| Operating Environment | 5~40°C; ≤80% RH |
| Weight | 260 kg |
| Dimensions (L*W*H) | 865*344*751 mm |
Load-Lock, Transfer, Metrology, Lithography
PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch
HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD
Company Details
Business Type:
Manufacturer,Distributor/Wholesaler,Agent,Exporter,Trading Company,Seller
Ecer Certification：
Verified Supplier
Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c... Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c...
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