≥99% Molybdenum Hexafluoride MoF₆ CAS 7783-77-9, for Semiconductor Thin-Film

Product Specification

1. Product Overview

Molybdenum Hexafluoride (MoF₆) is an important high-purity metal fluoride and electronic material precursor, serving as a critical chemical in advanced semiconductor manufacturing, functional thin-film materials, and molybdenum-based material preparation.

MoF₆ features relatively high volatility and favorable gas-phase transport characteristics, enabling its use as a molybdenum source precursor in chemical vapor deposition (CVD), atomic layer deposition (ALD), and advanced electronic material processes.

According to the COA provided by Changzhou Jiayuan Chemical Co., Ltd., the test results for this batch of Molybdenum Hexafluoride show MoF₆ content of 99%, air impurities of 1%, with a test conclusion of Pass.

2. Specifications

Product Name: Molybdenum Hexafluoride

English Name: Molybdenum Hexafluoride

Abbreviation: MoF₆

Chemical Formula: MoF₆

CAS No.: 7783-77-9

Product Category: High-Purity Metal Fluoride / Electronic Material Precursor

Purity: ≥99%

Test Method: Gas Chromatography, Area Normalization Method

Packaging: High-Purity Cylinders

3. Product Quality Specifications

According to the COA test data from Changzhou Jiayuan Chemical Co., Ltd.:

MoF₆ Content: 99%;

Air Content: 1%.

The test was performed by gas chromatography injection, with results obtained via area normalization method. The test conclusion is Pass.

4. Main Application Areas

① Semiconductor Thin-Film Deposition

MoF₆ can serve as a molybdenum source precursor for molybdenum thin-film deposition processes in advanced semiconductor manufacturing.

② Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD)

Leveraging the volatility and gas-phase reaction characteristics of MoF₆, it can be used in precision thin-film fabrication.

③ Molybdenum-Based Electronic Materials

Used in the manufacture of conductive thin films, electrode materials, and functional molybdenum materials.

④ Research and High-End Material Development

Used in the study of novel semiconductor materials, nanomaterials, and specialty molybdenum compounds.

5. Product Characteristics and Advantages

① Efficient Molybdenum Element Transport Capability

As a gaseous molybdenum source, MoF₆ is suitable for precision thin-film processes.

② High-End Electronic Material Application Value

Primarily targeting semiconductors, advanced manufacturing, and research sectors.

③ High-Purity Fluoride Characteristics

Meets the requirements for stable supply and quality control of metal precursors.

6. Distinctions from Related Products

① MoF₆ vs. WF₆

WF₆ is primarily used for tungsten thin-film deposition, while MoF₆ is mainly used for molybdenum thin-film and molybdenum material preparation.

② MoF₆ vs. SiH₄

SiH₄ is a silicon source gas, while MoF₆ is a metal molybdenum source precursor.

③ MoF₆ vs. Conventional Molybdenum Compounds

MoF₆ offers volatility and vapor deposition advantages, making it more suitable for advanced electronic manufacturing.

7. Russian Market Procurement Considerations

Customers typically focus on the following:

-MoF₆ Purity;

-Air and Impurity Content;

-Cylinder Cleanliness;

-Filling Consistency and Stability;

-Batch-to-Batch Consistency;

-Technical Documentation including COA, TDS, SDS, and Shipping Documents.

The test results for this batch of product from Changzhou Jiayuan Chemical Co., Ltd. meet the requirements.

8. Product Supply Advantages

-High-Purity Metal Fluoride Product;

-Targets Semiconductor and Electronic Material Sectors;

-Supports High-Purity Packaging Supply;

-Suitable for Both Research and Industrial Customer Procurement;

-Provides Complete Quality Documentation.

9. Frequently Asked Questions (FAQ)

Q: Which industries are the primary users of Molybdenum Hexafluoride?

A: It is mainly used in semiconductor thin-film deposition, electronic materials, molybdenum-based functional materials, and research applications.

Q: Why is MoF₆ suitable for semiconductor processes?

A: MoF₆ is volatile and can participate as a gaseous molybdenum source in CVD and ALD processes.

Q: What is the difference between MoF₆ and WF₆?

A: WF₆ primarily provides tungsten element, while MoF₆ primarily provides molybdenum element, used for different thin-film material fabrication.

Q: What documentation is typically required for MoF₆ procurement?

A: COA, TDS, SDS, packaging information, and shipping documentation are typically required.