Product Specification

Silicon Carbide (SiC) Ceramic Tray for High Temperature Processing

Overview

Silicon Carbide (SiC) Ceramic Trays are high-performance carriers designed for demanding thermal, chemical, and mechanical environments. With exceptional hardness, thermal shock resistance, and stability at elevated temperatures, SiC trays have become a preferred solution for semiconductor processing, LED manufacturing, advanced material sintering, and high-purity thermal applications. Their durability and low contamination characteristics ensure consistent process reliability and long service life.

Material Properties

Silicon carbide ceramics deliver a combination of physical and chemical strengths that outperform conventional alumina and quartz trays:

• High Temperature Resistance: Stable performance above 1600–1700 °C, suitable for high-temperature furnaces.

• Excellent Thermal Shock Resistance: Rapid heating and cooling cycles without cracking.

• High Hardness & Wear Resistance: Extends lifetime under mechanical stress.

• Low Thermal Expansion (CTE): Ensures dimensional stability during thermal cycling.

• High Thermal Conductivity: Promotes uniform heat distribution, improving sintering consistency.

• Corrosion & Oxidation Resistant: Greatly reduces contamination risk.

• Low Outgassing: Suitable for ultra-clean processes.

Manufacturing Process

SiC ceramic trays are typically manufactured through pressureless sintering, reaction bonding (RBSiC), or chemical vapor deposition (CVD-SiC) depending on the purity and performance requirements:

• RBSiC (Reaction-Bonded SiC): High strength, excellent thermal shock properties, cost-effective.

• SSiC (Sintered SiC): Higher purity, higher density, better chemical stability, ideal for semiconductor.

• CVD-SiC Coating: Provides extremely pure, pore-free, corrosion-resistant surfaces for advanced wafer processes.

Each production route ensures high uniformity, precise dimensional control, and customizable geometry.

Key Applications

SiC ceramic trays are widely used across multiple industries:

Semiconductor & Microelectronics

• Wafer loading, high-temperature processing, LPCVD/PECVD support

• Diffusion, oxidation, rapid thermal processes

• High-purity material transport and carrier platforms

LED & Optoelectronic Manufacturing

• Sapphire, GaN, SiC wafer sintering and annealing

• Epitaxy and high-temperature heat treatment support

Powder Metallurgy & Sintering

• Ceramics, magnetic materials, and metal powder sintering

• High-temperature furnace carriers and separators

Lithium Battery & Advanced Materials

• Powder calcination, phosphating, high-temperature coating

• Support fixtures for advanced energy materials

General Industrial Furnaces

• High-temperature baking, heat treatment, thermal cycling

Advantages of SiC Ceramic Trays

Compared with traditional graphite, alumina, or metal trays, SiC ceramic trays offer significant benefits:

• Longer service life in repeated high-temperature cycles

• Lower contamination, ensuring stable process quality

• Higher mechanical strength to resist deformation

• Uniform heat conduction for improved product consistency

• Customizable design, including slots, holes, grooves, and complex geometries

• Compatible with cleanroom and vacuum environments

Available Specifications

We offer standard and custom-designed trays, including:

• Flat trays, porous trays, grid trays

• Dimensions: Common sizes include 100–500 mm; customizable

• Thickness: 3–20 mm or based on customer request

• Material options: RBSiC, SSiC, CVD-SiC

• Surface finishing: Polishing, CVD coating, chamfering, laser marking

Custom OEM/ODM services are supported for special furnace models, automated systems, or specific production lines.

FAQ

Q1: What is the difference between RBSiC and SSiC trays?

RBSiC provides excellent mechanical strength at a lower cost, while SSiC provides higher purity, better corrosion resistance, and is ideal for semiconductor environments.

Q2: Can SiC trays withstand rapid thermal cycling?

Yes. SiC has outstanding thermal shock resistance, making it suitable for fast heating and cooling processes.

Q3: Can the tray shape be customized?

Absolutely. We can produce trays with complex geometries, including grooves, holes, borders, and multi-layer structures.

Q4: Will SiC contaminate products during high-temperature operation?

No. SiC is chemically stable, oxidation resistant, and has low outgassing, ensuring low contamination.

Q5: Do SiC trays require a specific cleaning method?

Cleaning depends on the material grade: SSiC and CVD-SiC allow acid/base cleaning; RBSiC requires milder methods to avoid surface alteration.

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About Us

ZMSH specializes in high-tech development, production, and sales of special optical glass and new crystal materials. Our products serve optical electronics, consumer electronics, and the military. We offer Sapphire optical components, mobile phone lens covers, Ceramics, LT, Silicon Carbide SIC, Quartz, and semiconductor crystal wafers. With skilled expertise and cutting-edge equipment, we excel in non-standard product processing, aiming to be a leading optoelectronic materials high-tech enterprise.