Payment Terms | T/T |
Supply Ability | By case |
Delivery Time | 2-4 weeks |
Packaging Details | custom cartons |
Brand Name | ZMSH |
Place of Origin | China |
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Product Specification
Payment Terms | T/T | Supply Ability | By case |
Delivery Time | 2-4 weeks | Packaging Details | custom cartons |
Brand Name | ZMSH | Place of Origin | China |
With the rapid advancement of the semiconductor industry, the demand for higher performance in processing and inspection equipment continues to increase. Leveraging years of experience in motion control and ultra-precision positioning, we have developed a planar H-type dual-axis ultra-precision air-bearing stage.
The stage features a finite-element-optimized silicon carbide ceramic structure combined with compensated air-bearing technology, delivering both exceptional accuracy and superior dynamic performance. It is widely applied in:
Semiconductor processing and inspection
Micro/nano fabrication
Nanometer-level fly-cutting and polishing
High-speed scanning applications
Silicon carbide ceramic air-bearing guideway, ultra-high precision
Maximum speed 1 m/s, acceleration up to 4 g, fast settling time
Y-axis dual-drive gantry structure for high load capacity
Optional encoder: optical grating or laser interferometer
Positioning accuracy: ±0.15 μm; repeatability: ±75 nm
Optimized cable management for clean design and stable operation
Customizable design for specific applications
SiC Ceramic Structure: ~5× stiffness of aluminum alloy and ~5× lower thermal expansion coefficient, enhancing tracking accuracy and stability under high-speed operation.
Air-Bearing Compensation: Proprietary compensation method improves stiffness and load capacity, ensuring fast motion and rapid settling.
Dynamic Performance: Achieves 1 m/s velocity and 4 g acceleration, suitable for high-throughput processes.
Flexible Integration: Compatible with active/passive vibration isolation, rotary stages, tilt modules, or wafer handling systems.
Cable Optimization: Carefully designed bending radius prevents motion-induced stress, ensuring long-term reliability.
Coreless Linear Motor: Delivers smooth motion with zero cogging force.
Multi-Motor Drive: Scanning and stepping axes are powered by multiple motors positioned near the load plane, improving straightness, flatness, and angular precision.
Thermal Management: Motors are thermally isolated and can be air- or water-cooled for high duty-cycle applications.
Model | 400-400 | 500-500 | 600-600 |
---|---|---|---|
Axes | X (scan) / Y (step) | X (scan) / Y (step) | X (scan) / Y (step) |
Travel (mm) | 400 / 400 | 500 / 500 | 600 / 600 |
Accuracy (μm) | ±0.15 | ±0.2 | ±0.2 |
Repeatability (nm) | ±75 | ±100 | ±100 |
Resolution (nm) | 0.3 | 0.3 | 0.3 |
Max Speed (m/s) | 1 | 1 | 1 |
Acceleration (g) | 4 | 4 | 4 |
Straightness (μm) | ±0.2 | ±0.3 | ±0.4 |
Stability (nm) | ±5 | ±5 | ±5 |
Max Load (kg) | 20 | 20 | 20 |
Pitch (arc-sec) | ±1 | ±1 | ±1 |
Roll (arc-sec) | ±1 | ±1 | ±1 |
Yaw (arc-sec) | ±1 | ±1 | ±1 |
Test Conditions:
Air supply: clean and dry, dew point ≤ 0°F, particle filtration ≤ 0.25 μm, or 99.99% pure nitrogen.
Accuracy measured 25 mm above stage center, at 20±1 °C, 40–60% RH.
Semiconductor lithography, inspection, and wafer handling
Micro/nano fabrication and metrology
Precision optics manufacturing and interferometry
Aerospace and scientific ultra-precision motion systems
Company Details
Business Type:
Manufacturer,Agent,Importer,Exporter,Trading Company
Year Established:
2013
Total Annual:
1000000-1500000
Ecer Certification:
Verified Supplier
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widely used in electronics, op... SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widely used in electronics, op...
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