cvd sic electrode for plasma etching

{"cid":"91184473","title":"CVD SiC Electrode for Plasma Etching & Semiconductor Process Chambers","imgUrl":"https:\/\/img.chinax.com\/nimg\/6f\/ee\/eb69a9c288410019380a2f15dfeb-200x200-1.jpg","attrs":{"Brand Name":"ZMSH","Minimum Order Quantity":"10","Delivery Time":"2-4 Weeks","Place of Origin":"SHANGHAI,CHINA","Payment Terms":"T\/T","Material":"CVD Silicon Carbide (SiC)","Purity":"\u2265 99.9%","Density":"\u2265 3.1 g\/cm\u00b3","Maximum Diameter":"Up to 330 mm","Surface Roughness":"Ra \u2264 1.6 \u03bcm","Machining Precision":"< 10 \u03bcm","Hardness":"~9.2 Mohs","Operating Temperature":">1000\u00b0C (process dependent)","Surface Finish":"Ground \/ Polished Optional"}}

{"cid":"91191224","title":"CVD SiC Components for Semiconductor Equipment SiC Ring SiC Electrode Dry Etch","imgUrl":"https:\/\/img.chinax.com\/nimg\/86\/5b\/c9a840fef5169e8bd5eb5992625d-200x200-1.jpg","attrs":{"Price":"20USD","Brand Name":"ZMSH","Minimum Order Quantity":"2","Delivery Time":"2-4 weeks","Place of Origin":"China","Payment Terms":"T\/T","Supply Ability":"By case","Packaging Details":"custom cartons","material":"Material","Max Diameter":"Max 370 mm","Resistivity":"Low Res. <0.02 \u03a9\u00b7cm; Middle Res. 0.2\u201325 \u03a9\u00b7cm; High Res. >100 \u03a9\u00b7cm","RRG":"<5","Surface Condition":"groud","Machining Precision":"<10 \u03bcm"}}