SHANGHAI FAMOUS TRADE CO.,LTD
| Payment Terms | T/T |
| Delivery Time | 2-4 Weeks |
| Material | CVD Silicon Carbide (SiC) |
| Purity | ≥ 99.9% |
| Density | ≥ 3.1 g/cm³ |
| Maximum Diameter | Up to 330 mm |
| Surface Roughness | Ra ≤ 1.6 μm |
| Machining Precision | < 10 μm |
| Hardness | ~9.2 Mohs |
| Operating Temperature | >1000°C (process dependent) |
| Surface Finish | Ground / Polished Optional |
| Brand Name | ZMSH |
| Place of Origin | SHANGHAI,CHINA |
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Product Specification
| Payment Terms | T/T | Delivery Time | 2-4 Weeks |
| Material | CVD Silicon Carbide (SiC) | Purity | ≥ 99.9% |
| Density | ≥ 3.1 g/cm³ | Maximum Diameter | Up to 330 mm |
| Surface Roughness | Ra ≤ 1.6 μm | Machining Precision | < 10 μm |
| Hardness | ~9.2 Mohs | Operating Temperature | >1000°C (process dependent) |
| Surface Finish | Ground / Polished Optional | Brand Name | ZMSH |
| Place of Origin | SHANGHAI,CHINA | ||
| High Light | CVD SiC electrode for plasma etching ，SiC substrate for semiconductor chambers ，SiC electrode with CVD coating | ||
The CVD Silicon Carbide (SiC) Electrode is a high-performance semiconductor chamber component engineered for plasma etching, PECVD, ICP, and advanced wafer processing systems. Manufactured from high-purity Chemical Vapor Deposition (CVD) Silicon Carbide, the electrode delivers exceptional plasma erosion resistance, thermal stability, and long-term electrical consistency in aggressive semiconductor environments.
Compared with conventional silicon electrodes, CVD SiC electrodes provide significantly improved operational lifetime, lower particle generation, and superior resistance to fluorine- and chlorine-based plasma chemistries. These advantages make them an ideal solution for advanced semiconductor fabs requiring stable, contamination-controlled, and high-throughput processing.
Designed for harsh plasma applications, SiC electrodes maintain stable electrical and thermal characteristics during prolonged processing cycles, helping improve process repeatability, chamber uptime, and wafer yield.
In semiconductor plasma chambers, electrodes are essential for:
Under high-energy plasma exposure, conventional silicon electrodes gradually suffer from:
CVD SiC electrodes overcome these limitations through their dense crystal structure, high purity, and outstanding corrosion resistance.
CVD SiC demonstrates excellent resistance to fluorine-based and chlorine-based plasma chemistries including:
This significantly reduces electrode erosion and extends operational lifetime under continuous plasma exposure.
Compared with traditional silicon electrodes, SiC electrodes can typically achieve:
The dense CVD SiC structure minimizes micro-flaking and surface degradation, reducing contamination risk and helping improve semiconductor yield performance.
Excellent heat dissipation capability helps:
SiC electrodes maintain stable resistivity and RF characteristics over long production cycles, helping ensure consistent plasma behavior and repeatable wafer processing.
Electrodes are manufactured with high dimensional accuracy and customizable gas distribution patterns to support advanced semiconductor integration requirements.
| Parameter | Specification |
|---|---|
| Material | CVD Silicon Carbide (SiC) |
| Purity | ≥ 99.9% |
| Density | ≥ 3.1 g/cm³ |
| Maximum Diameter | Up to 330 mm |
| Thickness | Customizable |
| Thermal Conductivity | 120–200 W/m·K |
| Surface Roughness | Ra ≤ 1.6 μm |
| Machining Precision | < 10 μm |
| Hardness | ~9.2 Mohs |
| Operating Temperature | >1000°C (process dependent) |
| Surface Finish | Ground / Polished Optional |
| Gas Hole Diameter | Customizable |
| Resistivity Options | Low / Medium / High Resistivity Available |
Semiconductor ApplicationsWidely used in ICP and RIE plasma etching chambers requiring high plasma resistance and stable RF performance.
Suitable for deposition systems operating under high-temperature and corrosive gas conditions.
Excellent durability for long-cycle plasma processing applications.
Used in surface activation, cleaning, modification, and advanced semiconductor processing steps.
Compatible with high-throughput semiconductor production lines and advanced process nodes.
| Feature | CVD SiC Electrode | Conventional Silicon Electrode |
|---|---|---|
| Plasma Resistance | Excellent | Moderate |
| Service Life | Very Long | Shorter |
| Particle Generation | Very Low | Higher |
| Thermal Stability | Excellent | Moderate |
| Corrosion Resistance | Outstanding | Limited |
| Process Stability | High | Moderate |
| Maintenance Frequency | Low | Higher |
Custom semiconductor-grade SiC electrodes are available with:
OEM and drawing-based manufacturing are supported.
✔ Extended chamber component lifetime
✔ Reduced consumable replacement frequency
✔ Lower particle contamination risk
✔ Improved wafer yield stability
✔ Reduced maintenance downtime
✔ Better plasma process consistency
✔ Suitable for aggressive fluorine plasma environments
Yes. SiC electrodes are semiconductor consumable components, but their lifetime is significantly longer than conventional silicon electrodes.
CVD SiC provides superior plasma erosion resistance, excellent chemical stability, and low particle generation under aggressive semiconductor processing conditions.
Yes. Diameter, thickness, resistivity, gas hole layout, mounting structure, and surface finish can all be customized according to chamber requirements.
They are widely used in:
Company Details
Business Type:
Manufacturer,Agent,Importer,Exporter,Trading Company
Year Established:
2013
Total Annual:
1000000-1500000
Ecer Certification：
Verified Supplier
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widel... SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widel...
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