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Ningbo Baosi Energy Equipment Co., Ltd.

  • China,Ningbo ,Zhejiang
  • Verified Supplier
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China GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process
China GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process

  1. China GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process

GRH3001 Dry Claw Vacuum Pump 3000 m³/h Oil-Free Design for Semiconductor Process

  1. MOQ: 1 Set
  2. Price: USD 12800-18500/Set
  3. Get Latest Price
Ultimate Pressure ≤0.5 Pa
Pumping Speed 3000 m³/h
Inlet ISO160
Dimensions 922×516×988 mm
Noise ≤70 dB(A)
Weight 770 kg
N2 Purge 0.2-0.6 MPa, 43/97/123 L/min
Delivery Time 20-35 Working Days
Outlet KF40
Voltage 380V/3-Phase
Motor Power 11+7.5 kW
Packaging Details Export Standard Wooden Case Packaging
Payment Terms T/T,L/C
Cooling Water 0.1-0.6 MPa, 11 L/min
Supply Ability 30 Sets/Month
Brand Name Baosi
Certification CE
Model Number GRH3001
Place of Origin China

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  1. Product Details
  2. Company Details

Product Specification

Ultimate Pressure ≤0.5 Pa Pumping Speed 3000 m³/h
Inlet ISO160 Dimensions 922×516×988 mm
Noise ≤70 dB(A) Weight 770 kg
N2 Purge 0.2-0.6 MPa, 43/97/123 L/min Delivery Time 20-35 Working Days
Outlet KF40 Voltage 380V/3-Phase
Motor Power 11+7.5 kW Packaging Details Export Standard Wooden Case Packaging
Payment Terms T/T,L/C Cooling Water 0.1-0.6 MPa, 11 L/min
Supply Ability 30 Sets/Month Brand Name Baosi
Certification CE Model Number GRH3001
Place of Origin China
High Light high capacity dry vacuum pump3000m3h claw vacuum pumpindustrial semiconductor vacuum pump
GRH3001 Dry Claw Vacuum Pump 3000 m³/h High-Capacity Oil-Free Vacuum Pump for Semiconductor Industrial Process
GRH3001 Dry Claw Vacuum Pump — 3000 m³/h High-Capacity Oil-Free Solution

The GRH3001 is a high-capacity dry claw vacuum pump delivering 3000 m³/h pumping speed with ultimate pressure ≤0.5 Pa. With a powerful 11+7.5 kW dual motor configuration, it handles the most demanding semiconductor, photovoltaic, and lithium battery manufacturing processes while maintaining contamination-free operation.

Key Features
  • High-Capacity Oil-Free Design: 3000 m³/h pumping speed with zero oil contamination risk
  • Dual Motor System: 11+7.5 kW permanent magnet synchronous motors for maximum efficiency
  • Advanced Claw Rotor: Superior dust handling and long service life in harsh environments
  • Dust & Vapor Tolerant: Insensitive to particulates and water vapor in process gases
  • Compact Integration: 922 * 516 * 988 mm footprint with 770 kg robust construction
  • Comprehensive Protection: Full safety and monitoring features with adaptive control
  • Low Noise Operation: ≤70 dB(A) for comfortable working environments
  • Multi-Layer Sealing: Lip seal + labyrinth seal + nitrogen purge for guaranteed oil-free vacuum
  • Smart Connectivity: I/O and RS485 (Modbus protocol) remote monitoring and control
Technical Specifications
Model GRH3001
Pumping Speed 3000 m³/h
Ultimate Pressure ≤0.5 Pa
Motor Power 11 + 7.5 kW
Voltage 380V (3-Phase)
Inlet Connection ISO160
Outlet Connection KF40
Noise Level ≤70 dB(A)
Weight 770 kg
Dimensions (L*W*H) 922 * 516 * 988 mm
Cooling Water Pressure 0.1–0.6 MPa
Cooling Water Flow 11 L/min
N₂ Purge Pressure 0.2–0.6 MPa
N₂ Purge Flow 43/97/123 L/min
Operating Temperature 5–40°C; ≤90% RH
Applications
  • Semiconductor: Etch, Ion Implantation, CVD (ALD, LPCVD, PECVD, MOCVD, SACVD, RTP, HDP-CVD)
  • Photovoltaic: Crystal growth, solar cell manufacturing processes
  • Lithium Battery: Cell vacuum drying, electrolyte filling, degassing processes

Company Details

Bronze Gleitlager

,

Bronze Sleeve Bushings

 and 

Graphite Plugged Bushings

 from Quality China Factory
  • Business Type:

    Manufacturer,Importer,Exporter

  • Year Established:

    2005

  • Total Annual:

    200000000-300000000

  • Employee Number:

    1500~2200

  • Ecer Certification:

    Verified Supplier

NINGBO BAOSI ENERGY EQUIPMENT CO., LTD. (hereinafter Baosi) in China. Baosi was founded in 2005, and in April 2015, the company began to issue stocks on the Shenzhen Stock Exchange (stock code: 300441). Factory II Factory I Currently, Baosi focuses on the manufacturing of high-end p... NINGBO BAOSI ENERGY EQUIPMENT CO., LTD. (hereinafter Baosi) in China. Baosi was founded in 2005, and in April 2015, the company began to issue stocks on the Shenzhen Stock Exchange (stock code: 300441). Factory II Factory I Currently, Baosi focuses on the manufacturing of high-end p...

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Get in touch with us

  • Reach Us
  • Ningbo Baosi Energy Equipment Co., Ltd.
  • No.55 ,Juchao Rd,Jiangkou Subdistrict,Fenghua District, Ningbo,Zhejiang,China.
  • https://www.baosivacuum.com/

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