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Ningbo Baosi Energy Equipment Co., Ltd.

  • China,Ningbo ,Zhejiang
  • Verified Supplier
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China GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock
China GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock

  1. China GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock

GRM4201 Large Multi-Stage Roots Dry Vacuum Pump 4200 m³/h Oil-Free for Load-Lock

  1. MOQ: 1 Set
  2. Price: USD 22000-35000/Set
  3. Get Latest Price
Noise ≤75 dB(A)
Pumping Speed 4200 m³/h
Packaging Details Export Standard Wooden Case Packaging
Ultimate Pressure ≤0.5 Pa
Supply Ability 15 Sets/Month
Weight 1400 kg
Delivery Time 30-45 Working Days
Payment Terms T/T,L/C
Inlet ISO160
Dimensions 1695×600×1450 mm (main) + 295×600×1450 mm (booster)
Brand Name Baosi
Certification CE
Model Number GRM4201
Place of Origin China

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  1. Product Details
  2. Company Details

Product Specification

Noise ≤75 dB(A) Pumping Speed 4200 m³/h
Packaging Details Export Standard Wooden Case Packaging Ultimate Pressure ≤0.5 Pa
Supply Ability 15 Sets/Month Weight 1400 kg
Delivery Time 30-45 Working Days Payment Terms T/T,L/C
Inlet ISO160 Dimensions 1695×600×1450 mm (main) + 295×600×1450 mm (booster)
Brand Name Baosi Certification CE
Model Number GRM4201 Place of Origin China
High Light large roots dry vacuum pump4200m3h load lock vacuumhigh capacity semiconductor pump
GRM4201 Large Multi-Stage Roots Dry Vacuum Pump — 4200 m³/h High-Capacity Solution

The GRM4201 is a large-scale multi-stage roots dry vacuum pump specifically designed for Load-Lock chambers, transfer chambers, and fast pump-down applications. With 4200 m³/h pumping speed and 13+10 kW dual motor configuration, it meets the demands of heterojunction solar cell manufacturing and lithium battery gigafactories where rapid cycling and high vacuum integrity are critical.

Key Features
  • Ultra-High Capacity: 4200 m³/h for rapid Load-Lock pump-down cycles
  • Multi-Stage Roots + Booster: High vacuum with wide working pressure range
  • Powerful Dual Motor: 13+10 kW permanent magnet synchronous motors
  • Unique Rotor Design: Optimized for low energy consumption with high efficiency
  • Oil-Free Clean Vacuum: No oil contamination — ideal for semiconductor and solar
  • Precision Manufacturing: Advanced CNC-machined rotors with full interchangeability
  • Dual-End Bearing Support: Ultra-reliable rotor support with minimal vibration
  • Superior Start-Up Reliability: Engineered for demanding process cycling
  • Advanced Sealing: Lip seal + labyrinth oil barrier + nitrogen purge — truly oil-free
  • Water-Cooled Sealed Motor: Eliminates oil leak risk, extends service life
  • Intelligent Control: One-touch start/stop with I/O and RS485 (Modbus-RTU)
Technical Specifications
Model GRM4201
Pumping Speed 4200 m³/h
Ultimate Pressure (w/o purge) ≤0.5 Pa
Motor Power 13 + 10 kW
Voltage 380V (3-Phase)
Inlet Connection ISO160
Outlet Connection KF50
Noise Level (with silencer) ≤75 dB(A)
Weight 1400 kg (main pump)
Dimensions — Main Pump (L*W*H) 1695 * 600 * 1450 mm
Dimensions — Booster (L*W*H) 295 * 600 * 1450 mm
Cooling Water Pressure 0.1–0.7 MPa
Cooling Water Flow 8–10 L/min
N₂ Purge Pressure 0.2–0.5 MPa
N₂ Purge Flow 0–120 L/min
Operating Temperature 5–40°C; ≤80% RH
Applications
  • Semiconductor Manufacturing: Load-Lock chambers, transfer modules, process interfaces
  • Heterojunction (HJT) Solar Cell: PECVD vacuum, rapid pump-down
  • Lithium Battery Gigafactories: High-volume cell drying and vacuum processing
  • Vacuum Coating: Load-Lock for substrate transfer while maintaining chamber vacuum

Company Details

Bronze Gleitlager

,

Bronze Sleeve Bushings

 and 

Graphite Plugged Bushings

 from Quality China Factory
  • Business Type:

    Manufacturer,Importer,Exporter

  • Year Established:

    2005

  • Total Annual:

    200000000-300000000

  • Employee Number:

    1500~2200

  • Ecer Certification:

    Verified Supplier

NINGBO BAOSI ENERGY EQUIPMENT CO., LTD. (hereinafter Baosi) in China. Baosi was founded in 2005, and in April 2015, the company began to issue stocks on the Shenzhen Stock Exchange (stock code: 300441). Factory II Factory I Currently, Baosi focuses on the manufacturing of high-end p... NINGBO BAOSI ENERGY EQUIPMENT CO., LTD. (hereinafter Baosi) in China. Baosi was founded in 2005, and in April 2015, the company began to issue stocks on the Shenzhen Stock Exchange (stock code: 300441). Factory II Factory I Currently, Baosi focuses on the manufacturing of high-end p...

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Get in touch with us

  • Reach Us
  • Ningbo Baosi Energy Equipment Co., Ltd.
  • No.55 ,Juchao Rd,Jiangkou Subdistrict,Fenghua District, Ningbo,Zhejiang,China.
  • https://www.baosivacuum.com/

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