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Ningbo Baosi Energy Equipment Co., Ltd.

  • China,Ningbo ,Zhejiang
  • Verified Supplier
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China GRM1201 Multi-Stage Roots Dry Vacuum Pump 1200 m³/h Oil-Free for Semiconductor
China GRM1201 Multi-Stage Roots Dry Vacuum Pump 1200 m³/h Oil-Free for Semiconductor

  1. China GRM1201 Multi-Stage Roots Dry Vacuum Pump 1200 m³/h Oil-Free for Semiconductor

GRM1201 Multi-Stage Roots Dry Vacuum Pump 1200 m³/h Oil-Free for Semiconductor

  1. MOQ: 1 Set
  2. Price: USD 8500-12500/Set
  3. Get Latest Price
Ultimate Pressure ≤0.15 Pa
Supply Ability 50 Sets/Month
Noise ≤63 dB(A)
Payment Terms T/T,L/C
Outlet KF25
Weight 260 kg
N2 Purge 0.2-0.6 MPa, 12-50 L/min
Packaging Details Export Standard Wooden Case Packaging
Inlet ISO160
Dimensions 865×344×751 mm
Cooling Water 0.1-0.6 MPa, ≥4 L/min
Motor Power 1.9+1.9 kW
Pumping Speed 1200 m³/h
Delivery Time 15-30 Working Days
Voltage 380V/3-Phase
Certification CE
Place of Origin China
Brand Name Baosi
Model Number GRM1201

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  1. Product Details
  2. Company Details

Product Specification

Ultimate Pressure ≤0.15 Pa Supply Ability 50 Sets/Month
Noise ≤63 dB(A) Payment Terms T/T,L/C
Outlet KF25 Weight 260 kg
N2 Purge 0.2-0.6 MPa, 12-50 L/min Packaging Details Export Standard Wooden Case Packaging
Inlet ISO160 Dimensions 865×344×751 mm
Cooling Water 0.1-0.6 MPa, ≥4 L/min Motor Power 1.9+1.9 kW
Pumping Speed 1200 m³/h Delivery Time 15-30 Working Days
Voltage 380V/3-Phase Certification CE
Place of Origin China Brand Name Baosi
Model Number GRM1201
High Light high speed roots vacuum pump1200m3h dry vacuum pumpPECVD MOCVD process vacuum
GRM1201 Multi-Stage Roots Dry Vacuum Pump 1200 m³/h Oil-Free High-Speed Vacuum Pump for Semiconductor PECVD MOCVD
GRM1201 Multi-Stage Roots Dry Vacuum Pump — 1200 m³/h High-Speed Solution

The GRM1201 is a high-speed multi-stage roots dry vacuum pump delivering 1200 m³/h pumping speed with ultimate pressure of ≤0.15 Pa. Sharing the same compact platform as the GRM601 (865 * 344 * 751 mm, 260 kg) but with ISO160 inlet for higher throughput, it excels in PECVD, MOCVD and demanding semiconductor clean and medium process applications.

Key Features
  • High-Speed Multi-Stage Roots: 1200 m³/h with low power consumption
  • Dual Motor Efficiency: 1.9+1.9 kW permanent magnet synchronous motors
  • Excellent Ultimate Pressure: ≤0.15 Pa meets demanding process requirements
  • Ultra-Quiet: ≤63 dB(A) — cleanroom-compatible noise level
  • Large ISO160 Inlet: Handles high gas throughput for production-scale applications
  • Oil-Free Clean Vacuum: No oil contamination for sensitive semiconductor processes
  • Superior Dust Handling: Advanced rotor design for particle-rich environments
  • Compact Platform: Same footprint as GRM601 — easy line integration
  • Triple Sealing System: Lip seal + labyrinth + nitrogen purge guarantee oil-free vacuum
  • Smart Connectivity: I/O and RS485 (Modbus) for remote factory integration
Technical Specifications
Model GRM1201
Pumping Speed 1200 m³/h
Ultimate Pressure (w/o purge) ≤0.15 Pa
Motor Power 1.9 + 1.9 kW
Voltage 380V (3-Phase)
Inlet Connection ISO160
Outlet Connection KF25
Noise Level ≤63 dB(A)
Weight 260 kg
Dimensions (L*W*H) 865 * 344 * 751 mm
Cooling Water Pressure 0.1–0.6 MPa
Cooling Water Flow ≥4 L/min
N₂ Purge Pressure 0.2–0.6 MPa
N₂ Purge Flow 12–50 L/min
Operating Temperature 5–40°C; ≤90% RH
Applications
  • Semiconductor: PECVD, MOCVD, SACVD, RTP, HDP-CVD, ALD, Metal Etch, Silicon Etch
  • Photovoltaic: High-throughput solar cell manufacturing lines
  • Lithium Battery: Production-scale cell drying and electrolyte processing
  • Flat Panel Display: OLED and LCD manufacturing

Company Details

Bronze Gleitlager

,

Bronze Sleeve Bushings

 and 

Graphite Plugged Bushings

 from Quality China Factory
  • Business Type:

    Manufacturer,Importer,Exporter

  • Year Established:

    2005

  • Total Annual:

    200000000-300000000

  • Employee Number:

    1500~2200

  • Ecer Certification:

    Verified Supplier

NINGBO BAOSI ENERGY EQUIPMENT CO., LTD. (hereinafter Baosi) in China. Baosi was founded in 2005, and in April 2015, the company began to issue stocks on the Shenzhen Stock Exchange (stock code: 300441). Factory II Factory I Currently, Baosi focuses on the manufacturing of high-end p... NINGBO BAOSI ENERGY EQUIPMENT CO., LTD. (hereinafter Baosi) in China. Baosi was founded in 2005, and in April 2015, the company began to issue stocks on the Shenzhen Stock Exchange (stock code: 300441). Factory II Factory I Currently, Baosi focuses on the manufacturing of high-end p...

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Get in touch with us

  • Reach Us
  • Ningbo Baosi Energy Equipment Co., Ltd.
  • No.55 ,Juchao Rd,Jiangkou Subdistrict,Fenghua District, Ningbo,Zhejiang,China.
  • https://www.baosivacuum.com/

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