SUZHOU KACO VACUUM EQUIPMENT CO.,LTD.
| Pumping Speed | 1800 m³/h |
| Supply Ability | 500 Sets per Month |
| Dimensions (L×W×H) | 935×420×795 mm |
| Cooling Water Temperature | 10-30 °C |
| Noise Level | ＜70 dB(A) |
| Control Interface | I/O and RS485 (Modbus Protocol) |
| Voltage | 380V Three Phase |
| Weight | 472 kg |
| Packaging Details | Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert |
| Cooling Water Flow | 6 L/min |
| Outlet Connection | KF40 |
| Rated Power | 7.5+4.5 kW |
| N2 Purge Flow | 4-96 L/min |
| Sealing System | Lip Seal + Labyrinth Seal with N2 Purge |
| Delivery Time | 15-30 working days |
| Motor Type | Permanent Magnet Synchronous Motor (PMSM) |
| Inlet Connection | ISO160 |
| Payment Terms | T/T, L/C, Western Union |
| Ultimate Pressure | ≤0.5 Pa |
| Pump Type | Dry Vacuum Pump |
| Certification | ISO 9001:2015, ISO 14001:2015, ISO 45001:2018 |
| Place of Origin | China |
| Model Number | GRH1802 |
| Brand Name | GRH |
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Product Specification
| Pumping Speed | 1800 m³/h | Supply Ability | 500 Sets per Month |
| Dimensions (L×W×H) | 935×420×795 mm | Cooling Water Temperature | 10-30 °C |
| Noise Level | ＜70 dB(A) | Control Interface | I/O and RS485 (Modbus Protocol) |
| Voltage | 380V Three Phase | Weight | 472 kg |
| Packaging Details | Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert | Cooling Water Flow | 6 L/min |
| Outlet Connection | KF40 | Rated Power | 7.5+4.5 kW |
| N2 Purge Flow | 4-96 L/min | Sealing System | Lip Seal + Labyrinth Seal with N2 Purge |
| Delivery Time | 15-30 working days | Motor Type | Permanent Magnet Synchronous Motor (PMSM) |
| Inlet Connection | ISO160 | Payment Terms | T/T, L/C, Western Union |
| Ultimate Pressure | ≤0.5 Pa | Pump Type | Dry Vacuum Pump |
| Certification | ISO 9001:2015, ISO 14001:2015, ISO 45001:2018 | Place of Origin | China |
| Model Number | GRH1802 | Brand Name | GRH |
| High Light | 380V Three Phase dry vacuum pump ，1800 m³/h dry vacuum pump ，Semiconductor Process dry vacuum pump | ||
The GRH1802 is an 1800 m³/h dry vacuum pump designed for demanding semiconductor and photovoltaic processes. With an oil-free pump chamber, compact footprint, and low energy consumption, it delivers reliable performance with robust dust handling capability.
| Parameter | Specification |
|---|---|
| Pumping Speed | 1800 m³/h |
| Ultimate Pressure | ≤0.5 Pa |
| Rated Power | 7.5+4.5 kW |
| Voltage | 380V Three-Phase |
| Cooling Water Pressure | 0.3-0.6 MPa |
| Cooling Water Flow | 6 L/min |
| Cooling Water Temperature | 10-30 °C |
| Cooling Water Connection | G3/8 |
| N2 Purge Pressure | 0.3-0.6 MPa |
| N2 Purge Flow | 4-96 L/min |
| N2 Purge Connection | G1/4 |
| Inlet Connection | ISO160 |
| Outlet Connection | KF40 |
| Noise Level | ＜70 dB(A) |
| Operating Environment | 5~40°C; ≤80% RH |
| Weight | 472 kg |
| Dimensions (L*W*H) | 935*420*795 mm |
Load-Lock, Transfer, Metrology, Lithography
PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch
HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD
Company Details
Business Type:
Manufacturer,Distributor/Wholesaler,Agent,Exporter,Trading Company,Seller
Ecer Certification：
Verified Supplier
Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c... Company Profile Suzhou Kaco Vacuum Equipment Co., Ltd. is a leading high-tech enterprise specializing in delivering comprehensive vacuum demand solutions and advanced vacuum application processes. Integrating production, sales, technical R&D, and application services, the company is c...
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