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The ability to transport easily condensable process gases.
The stable pumping speed makes it suitable for processes with large exhaust volumes, offering high reliability and low operating and maintenance costs. It is suitable for clean, moderate, and demanding processes such as PECVD, MOCVD, and SiC-CVD in industries like photovoltaics and semiconductors.
Product Features
Utilizes a permanent magnet synchronous motor for lower energy consumption.
Advanced rotor structure enhances the pump's dust removal capacity.
Insensitive to dust and water vapor in the pumped gas;
Compact structure, small overall size, and high system efficiency;
Comprehensive protection functions and strong self-adaptability;
Low vibration and noise during operation; an advanced lip seal and labyrinth seal system, combined with nitrogen purging, effectively ensures an oil-free pump chamber, improving the vacuum cleanliness of the process chamber.
Remote control and monitoring functions are possible via the I/O interface and RS-485 interface (Moudbus protocol).
TECHNICAL PARAMETER
Model
Unit
GRM201
Pumping speed
m³/h
200
Ultimate pressure
Pa
≤0.5
Rated Power
kW
1.9
Rated Voltage
V
380
Cooling Water
Pressure
MPa
0.1-0.6
Flow
L/min
≥3
Temp.
℃
5~30
Connector
-
G3/8
N2 Purge
Pressure
MPa
0.2~0.6
Flow
L/min
12~50
Connector
-
G1/4
Inlet
-
ISO63
Outlet
-
KF25
Noise
dB
≤63
Working Temp.
℃
5~40
Weight
kgs
150
Pumping Curve
Drawing
Applications :
It is suitable for clean, moderate, and demanding processes such as PECVD, MOCVD, and SiC-CVD in industries like photovoltaics and semiconductors.
Company Details
Bronze Gleitlager
,
Bronze Sleeve Bushings
and
Graphite Plugged Bushings
from Quality China Factory
Business Type:
Manufacturer,Importer,Exporter
Year Established:
2005
Total Annual:
200000000-300000000
Employee Number:
1500~2200
Ecer Certification:
Verified Supplier
NINGBO BAOSI ENERGY EQUIPMENT CO., LTD. (hereinafter Baosi) in China. Baosi was founded in 2005, and in April 2015, the company began to issue stocks on the Shenzhen Stock Exchange (stock code: 300441).
Factory II
Factory I
Currently, Baosi focuses on the manufacturing of high-end p... NINGBO BAOSI ENERGY EQUIPMENT CO., LTD. (hereinafter Baosi) in China. Baosi was founded in 2005, and in April 2015, the company began to issue stocks on the Shenzhen Stock Exchange (stock code: 300441).
Factory II
Factory I
Currently, Baosi focuses on the manufacturing of high-end p...