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Ningbo Baosi Energy Equipment Co., Ltd.

  • China,Ningbo ,Zhejiang
  • Verified Supplier
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China GRM602 Multi-Stage Roots Dry Vacuum Pump 600 m³/h Oil-Free Medium-Capacity
China GRM602 Multi-Stage Roots Dry Vacuum Pump 600 m³/h Oil-Free Medium-Capacity

  1. China GRM602 Multi-Stage Roots Dry Vacuum Pump 600 m³/h Oil-Free Medium-Capacity

GRM602 Multi-Stage Roots Dry Vacuum Pump 600 m³/h Oil-Free Medium-Capacity

  1. MOQ: 1 Set
  2. Price: Negotiable
  3. Get Latest Price
Ultimate Pressure ≤0.15 Pa
Noise ≤63 dB(A)
Payment Terms T/T
Outlet KF25
Weight 260 kg
N2 Purge 0.2-0.6 MPa, 12-50 L/min
Delivery Time 15-30 Working Days
Inlet ISO100
Dimensions 865×344×751 mm
Cooling Water 0.1-0.6 MPa, ≥4 L/min
Motor Power 1.9+1.9 kW
Packaging Details Export Standard Wooden Case Packaging
Voltage 380V/3-Phase
Pumping Speed 600 m³/h
Supply Ability 50 Sets/Month
Place of Origin China
Brand Name Baosi
Certification CE
Model Number GRM601

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  1. Product Details
  2. Company Details

Product Specification

Ultimate Pressure ≤0.15 Pa Noise ≤63 dB(A)
Payment Terms T/T Outlet KF25
Weight 260 kg N2 Purge 0.2-0.6 MPa, 12-50 L/min
Delivery Time 15-30 Working Days Inlet ISO100
Dimensions 865×344×751 mm Cooling Water 0.1-0.6 MPa, ≥4 L/min
Motor Power 1.9+1.9 kW Packaging Details Export Standard Wooden Case Packaging
Voltage 380V/3-Phase Pumping Speed 600 m³/h
Supply Ability 50 Sets/Month Place of Origin China
Brand Name Baosi Certification CE
Model Number GRM601
High Light GRM602 oil-free dry vacuum pumpmulti-stage roots vacuum pumpsemiconductor process vacuum pump

GRM602 Multi-Stage Roots Dry Vacuum Pump — 600 m³/h Medium-Capacity Solution

The GRM601 is a medium-capacity multi-stage roots dry vacuum pump delivering 600 m³/h pumping speed with an impressive ultimate pressure of ≤0.15 Pa. Its dual 1.9+1.9 kW permanent magnet synchronous motors provide reliable oil-free vacuum for semiconductor, photovoltaic, and lithium battery applications.

Key Features

  • Multi-Stage Roots Design: High pumping speed with low power consumption
  • Dual Motor Configuration: 1.9+1.9 kW for balanced, efficient operation
  • Ultra-Low Ultimate Pressure: ≤0.15 Pa for demanding process requirements
  • Ultra-Quiet: ≤63 dB(A) — ideal for cleanroom environments
  • Oil-Free Mechanism: Zero oil contamination for sensitive processes
  • Superior Particle Handling: Advanced rotor structure for dusty processes
  • Compact Integration: 865 * 344 * 751 mm, 260 kg
  • Dust & Vapor Insensitive: Reliable with process byproducts and moisture
  • Advanced Sealing: Lip seal + labyrinth + nitrogen purge protection
  • Remote Intelligence: I/O and RS485 (Modbus) for factory automation

Technical Specifications

Model GRM602
Pumping Speed 600 m³/h
Ultimate Pressure (w/o purge) ≤0.15 Pa
Motor Power 1.9 + 1.9 kW
Voltage 380V (3-Phase)
Inlet Connection ISO100
Outlet Connection KF25
Noise Level ≤63 dB(A)
Weight 260 kg
Dimensions (L*W*H) 865 * 344 * 751 mm
Cooling Water Pressure 0.1–0.6 MPa
Cooling Water Flow ≥4 L/min
N₂ Purge Pressure 0.2–0.6 MPa
N₂ Purge Flow 12–50 L/min
Operating Temperature 5–40°C; ≤90% RH

Applications

  • Semiconductor: PECVD, MOCVD, SACVD, RTP, HDP-CVD, ALD, Metal Etch, Silicon Etch
  • Photovoltaic: Crystal growth, solar cell manufacturing
  • Lithium Battery: Cell drying, electrolyte filling, degassing
  • Flat Panel Display: LED and LCD manufacturing processes

Company Details

Bronze Gleitlager

,

Bronze Sleeve Bushings

 and 

Graphite Plugged Bushings

 from Quality China Factory
  • Business Type:

    Manufacturer,Importer,Exporter

  • Year Established:

    2005

  • Total Annual:

    200000000-300000000

  • Employee Number:

    1500~2200

  • Ecer Certification:

    Verified Supplier

NINGBO BAOSI ENERGY EQUIPMENT CO., LTD. (hereinafter Baosi) in China. Baosi was founded in 2005, and in April 2015, the company began to issue stocks on the Shenzhen Stock Exchange (stock code: 300441). Factory II Factory I Currently, Baosi focuses on the manufacturing of high-end p... NINGBO BAOSI ENERGY EQUIPMENT CO., LTD. (hereinafter Baosi) in China. Baosi was founded in 2005, and in April 2015, the company began to issue stocks on the Shenzhen Stock Exchange (stock code: 300441). Factory II Factory I Currently, Baosi focuses on the manufacturing of high-end p...

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Get in touch with us

  • Reach Us
  • Ningbo Baosi Energy Equipment Co., Ltd.
  • No.55 ,Juchao Rd,Jiangkou Subdistrict,Fenghua District, Ningbo,Zhejiang,China.
  • https://www.baosivacuum.com/

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